- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/063 - Geometrical arrangement of electrodes for beam-forming
Patent holdings for IPC class H01J 37/063
Total number of patents in this class: 85
10-year publication summary
|
2
|
8
|
7
|
2
|
11
|
13
|
6
|
8
|
8
|
3
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 770 |
8 |
| ASML Netherlands B.V. | 6816 |
6 |
| Canon Anelva Corporation | 676 |
4 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 149 |
4 |
| KLA-Tencor Corporation | 2574 |
4 |
| KLA Corporation | 1223 |
4 |
| Denki Kagaku Kogyo Kabushiki Kaisha | 680 |
3 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
3 |
| Hitachi High-Tech Corporation | 4424 |
3 |
| Arcam AB | 204 |
2 |
| IMS Nanofabrication GmbH | 56 |
2 |
| JEOL Ltd. | 556 |
2 |
| Mapper Lithography IP B.V. | 136 |
2 |
| National Institute for Materials Science | 1108 |
2 |
| NuFlare Technology America, Inc. | 21 |
2 |
| Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6132 |
2 |
| Samsung Electronics Co., Ltd. | 131630 |
1 |
| General Electric Company | 18133 |
1 |
| Hitachi High-Technologies Corporation | 2034 |
1 |
| Applied Materials, Inc. | 16587 |
1 |
| Other owners | 28 |